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Semiconductor Yield Models Considering Cluster Effect and Fault Observation

Title
Semiconductor Yield Models Considering Cluster Effect and Fault Observation
Authors
전치혁
Date Issued
1999-01-17
Publisher
SMOMS
URI
https://oasis.postech.ac.kr/handle/2014.oak/78090
Article Type
Conference
Citation
Int'l Conf on Semiconductor Manufacturing Operational Modeling & Simulation (SMOMS'99), page. 107 - 112, 1999-01-17
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전치혁JUN, CHI HYUCK
Dept of Industrial & Management Enginrg
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