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A New Cluster Index for Semiconductor Wafer Defects and Simulation-Based Yield Prediction Models
- Title
- A New Cluster Index for Semiconductor Wafer Defects and Simulation-Based Yield Prediction Models
- Authors
- 홍유신
- Date Issued
- 1997-12-01
- Publisher
- Cairo
- Article Type
- Conference
- Citation
- Proc. of the 22nd Int'l Conf. on Computers and Industrial Engineering, page. 619 - 622, 1997-12-01
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