Mechanical properties measurement of siliconnitride thin films using the bulge test
- Title
- Mechanical properties measurement of siliconnitride thin films using the bulge test
- Authors
- 박현철
- Publisher
- SPIE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/88599
- Article Type
- Conference
- Citation
- SPIE Microelectronics, MEMS and Nanotechnology
- Files in This Item:
- There are no files associated with this item.
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