Evolution of electron temperature in low pressure magnetized capacitive plasma
SCIE
SCOPUS
- Title
- Evolution of electron temperature in low pressure magnetized capacitive plasma
- Authors
- You, SJ; Park, GY; Kwon, JH; Kim, JH; Chang, HY; Lee, JK; Seong, DJ; Shin, YH
- Date Issued
- 2010-03-08
- Publisher
- AMER INST PHYSICS
- Abstract
- The evolution of electron temperature in a low pressure magnetized capacitive discharge was investigated under the collisionless electron heating regime. The results showed that while the electron temperature increases monotonously with the magnetic field in previous study [Turner et al., Phys. Rev. Lett. 76, 2069(1996)], the electron temperature in our experiment exhibited nonmonotonic evolution behavior with the magnetic field. This nonmonotonic evolution of the electron temperature with the magnetic field was shown to be a combined effect of suppressing electron resonance heating and enhancing collisional heating while increasing the magnetic field. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3309589]
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/9701
- DOI
- 10.1063/1.3309589
- ISSN
- 0003-6951
- Article Type
- Article
- Citation
- APPLIED PHYSICS LETTERS, vol. 96, no. 10, page. 101504 - 101506, 2010-03-08
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