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Critical dimension variations of sub 5-nm node fin and nanosheet FETs
- Title
- Critical dimension variations of sub 5-nm node fin and nanosheet FETs
- Date Issued
- 2019-07-03
- Publisher
- NANO KOREA
- Article Type
- Conference
- Citation
- the 17th International Nanotech Symposium & Exhibition, 2019-07-03
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg