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KANG, BONG KOO(강봉구)
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2008
1
Type
Article
1
Subject
BIAS TEMPERATURE INSTABILITY
1
BREAKDOWN
1
CURRENTS
1
DEVICES
1
equivalent oxide thickness
1
FILMS
1
gate dielectric
1
MODEL
1
MOSFET
1
OXIDE THICKNESS
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SCIE
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SCOPUS
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Subject
: MOSFET
Subject
: MODEL
Subject
: DEVICES
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Article
Electrical method of measuring physical thickness and nitrogen concentration of silicon oxynitride gate dielectric for MOSFETs
SCIE
SCOPUS
MICROELECTRONIC ENGINEERING, vol. 85, no. 8, page. 1820 - 1825, 2008-08
Do, JH
;
Kang, HS
;
Kang, BK
1
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