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KANG, BONG KOO(강봉구)
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2004
1
Type
Article
1
Subject
gate oxide integrity
1
hot carrier effect
1
OXIDATION
1
OXIDE
1
plasma nitridation
1
plasma oxidation
1
plasma process-induced damage
1
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SIO2
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SCIE
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SCOPUS
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: SILICON
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: OXIDE
Subject
: plasma oxidation
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Article
Plasma process induced damages on n-MOSFET with plasma oxidized and nitrided gate dielectrics
SCIE
SCOPUS
MICROELECTRONIC ENGINEERING, vol. 75, no. 4, page. 443 - 452, 2004-11
Jang, TS
;
Ha, MH
;
Yoo, KD
;
Kang, BK
1
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