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PARK, CHAN GYUNG(박찬경)
Department
Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2001
1
Type
Article
1
Journal Registered
SCIE
1
SCOPUS
1
Applied search limites :
Journal Registered
: scie
Date Issued
: [2000 TO 2009]
Date Issued
: 2001
Subject
: CHEMICAL-VAPOR-DEPOSITION
Subject
: OXIDATION
Subject
: CHEMICAL-VAPOR-DEPOSITION
Journal Papers(International)
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(Domestic)
Conference Papers(International)
Conference Papers(Domestic)
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Article
Improvement of the SiO2/Si interface characteristics by two-step deposition with intermediate plasma treatment using O-2/He gas
SCIE
SCOPUS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 19, no. 6, page. 2067 - 2072, 2001-11
Yi, C
;
Kim, HU
;
Rhee, SW
;
Oh, SH
;
Park, CG
1
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