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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2001
1
Type
Article
1
Subject
CHEMICAL-VAPOR-DEPOSITION
1
CHLORINE ADDITION
1
DIOXIDE
1
NITROGEN
1
OXIDATION
1
PHOTOELECTRON-SPECTROSCOPY
1
POLYCRYSTALLINE SILICON
1
SI-SIO2 INTERFACES
1
SI/SIO2 INTERFACES
1
X-RAY
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SCIE
1
SCOPUS
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: scie
Journal Registered
: scopus
Subject
: CHEMICAL-VAPOR-DEPOSITION
Date Issued
: 2001
Subject
: DIOXIDE
Subject
: NITROGEN
Subject
: DIOXIDE
Journal Papers(International)
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(Domestic)
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Conference Papers(Domestic)
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Article
Improvement of the SiO2/Si interface characteristics by two-step deposition with intermediate plasma treatment using O-2/He gas
SCIE
SCOPUS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 19, no. 6, page. 2067 - 2072, 2001-11
Yi, C
;
Kim, HU
;
Rhee, SW
;
Oh, SH
;
Park, CG
1
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