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PARK, CHAN GYUNG(박찬경)
Department
Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2014
1
Type
Article
1
Subject
SURFACE-CHEMISTRY
1
THIN-FILM
1
Through-silicon via
1
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SCIE
1
SCOPUS
1
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: Article
Subject
: GROWTH
Subject
: BINARY REACTION SEQUENCE
Subject
: High-k dielectrics
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Article
Filling performance and electrical characteristics of Al2O3 films deposited by atomic layer deposition for through-silicon via applications
SCIE
SCOPUS
THIN SOLID FILMS, vol. 556, page. 560 - 565, 2014-04-01
Choi, KK
;
Kee, J
;
Kim, SH
;
Park, MS
;
Park, CG
;
et al
1
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