Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BAEK, ROCK HYUN | - |
| dc.contributor.author | CHOI, KYEONG KEUN | - |
| dc.contributor.author | KANG, BOHYEON | - |
| dc.contributor.author | ANJEHYUN | - |
| dc.date.accessioned | 2020-01-06T04:50:23Z | - |
| dc.date.available | 2020-01-06T04:50:23Z | - |
| dc.date.created | 2020-01-06 | - |
| dc.date.issued | 2020-02-14 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/100683 | - |
| dc.publisher | 제 27회 반도체학술대회 | - |
| dc.relation.isPartOf | 제 27회 반도체학술대회 | - |
| dc.relation.isPartOf | 제 27회 반도체학술대회 | - |
| dc.title | Defect Curing Effects on High-k Gate Stack (Al/Al2O3/Si-sub) by Using H2 Plasma Treatment and Rapid Thermal Anneal | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제 27회 반도체학술대회 | - |
| dc.citation.conferenceDate | 2020-02-12 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 제 27회 반도체학술대회 | - |
| dc.contributor.affiliatedAuthor | BAEK, ROCK HYUN | - |
| dc.contributor.affiliatedAuthor | CHOI, KYEONG KEUN | - |
| dc.contributor.affiliatedAuthor | KANG, BOHYEON | - |
| dc.contributor.affiliatedAuthor | ANJEHYUN | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg