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2. Conference Papers8,542

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Issue Date Author Title Subject Journal

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Collection's Items (Sorted by Issue Date in Descending order): 8541 to 8542 of 8,542
Conference
Characteristics of Tantalum Carbo-nitride Thin Films Deposited with Atomic Layer Deposition Process

ECS Transactions, page. 227

Conference
Atomic Vapor Deposited Tantalum Carbo-Nitride Film using TBTDET and Hydrogen

ECS Transactions, page. 355

1420 421 422 423 424 425 426 427 428

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