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Showing results 64 to 83 of 188
Conference
Fabrication and gas sensor application of ZnO nanodots and nanowires on sapphire terraces

E-MRS 2008 Congress Center Strasbourg

Conference
Fabrication of ultra-sharp Nb nanopins array for the application of electron field emission devices

The IEEE Nanotechnology Material and Devices Conferences 2008

Conference
Fabrication of well-ordered diblock copolymer nanotemplates using surface neutralization by self assembled monolayer and their applications

Nano Korea 2007, 2007-08-01

Conference
Fabrication of well-ordered diblock copolymer nanotemplates using surface neutralization by self assembled monolayer and their applications

Materials Reasearch Society of Korea

Conference
Fabrication of well-ordered diblock copolymer nanotemplates using surface neutralization by self assembled monolayer and their applications

8차 나노와이어 연구회

Article
Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layerSCIESCOPUS

APPLIED PHYSICS LETTERS, vol. 96, no. 8, 2010-02-22

Conference
From PVD to CVD to ALD for Interconnects and Related Applications

Proceedings of IEEE International Interconnect Technology Conference, 2001-05-01

Conference
Gas-Source Molecular Beam Epitaxy of Si1-xGex on Si(011): Surface Structure, Growth Kinetics, and Surface Morphology

American Vacuum Society, 1998-11-01

Conference
Growth Kinetics and Initial Stage Growth during Ti Plasma Enhanced-Atomic Layer Deposition

American Vacuum Society, 2001-08-01

Article
Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin filmsSCIESCOPUS

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 24, no. 3, page. 1327 - 1332, 2006-05

Conference
Growth of Si1-xGex on Si(011)16x2 by Gas-Source Molecular-Beam Epitaxy

American Vacuum Society, 1997-10-01

Conference
Halide and metal organic based plasma-enhanced ALD of TaNx for Cu interconnect technology

American Vacuum Society, 2003-08-01

Article
HETEROEPITAXIAL FERROELECTRIC ZNSNO3 THIN FILMSCIESCOPUS

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 131, no. 24, page. 8386 - 8387, 2009-06-24

Conference
Hf-based Thin Films on Si and Ge Substrate by Plasma-Enhanced Atomic Layer Deposition

1st International Conference on Microelectronics and Plasma Technology

Article
HFO2/HFOXNY/HFO2 GATE DIELECTRIC FABRICATED BY IN SITU OXIDATION OF PLASMA-ENHANCED ATOMIC LAYER DEPOSITION HFN MIDDLE LAYERSCIESCOPUS

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 156, no. 8, page. G109 - G113, 2009-01

Conference
High density magnetic Co nanodot array fabrication using self-assembled diblock copolymer

MRS 2006 Fall Meeting

Conference
High performance N Doped Atomic Layer Deposition ZnO Thin Film Transistors

The 15th Korean Conference on Semiconductors

Article
High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnOSCIESCOPUS

APPLIED PHYSICS LETTERS, vol. 91, no. 18, 2007-10-29

Conference
High performance thin film transistors with N doped ZnO active layer prepared by atomic layer deposition

2007 년도 한국재료학회 추계학술대회 및 제 13회 신소재 심포지엄

Conference
High performance transparent thin film transistors from N doped atomic layer deposition ZnO

EMRS 2007 Fall meeting

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